Polybenzoxazole (PBO) based dielectrics for MCM and on-chip applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3582, Issue , 1998, Pages 236-238

  Sezi, R ^a   Maltenberger, A ^a   Radlik, W ^a   Schmid, G ^a   Weber, A ^a   Buschick, K ^a  

^a SIEMENS AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC MATERIALS; MICROPROCESSOR CHIPS; MULTICHIP MODULES; THICK FILMS;

INTERLAYER DIELECTRICS; POLYBENZOXAZOLE;

SEMICONDUCTING POLYMERS;

EID: 0032312315     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)