Use of micro-mechanical techniques, AFM and MFM to access surface deformation in multilayered thin films

Materials Research Society Symposium - Proceedings

Volumn 522, Issue , 1998, Pages 287-292

  Wu, Tsai Wei ^a   Frommer, Jane ^a  

^a IBM ALMADEN RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; COMPOSITE MICROMECHANICS; DEFORMATION; MAGNETIC DISK STORAGE; MULTILAYERS; SURFACE PROPERTIES; SURFACE TOPOGRAPHY; WEAR OF MATERIALS;

MAGNETIC COATINGS; MAGNETIC FORCE MICROSCOPY (MFM); SURFACE CORRUGATION;

MAGNETIC THIN FILM DEVICES;

EID: 0032312045     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)