Characterization of mechanical properties of thin polymer films using scanning probe microscopy

Materials Research Society Symposium - Proceedings

Volumn 522, Issue , 1998, Pages 217-223

  Xu, J ^a   Hooker, J ^a   Adhihetty, I ^a   Padmanabhan, P ^a   Chen, W ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC MODULI; MECHANICAL VARIABLES MEASUREMENT; MICROSCOPIC EXAMINATION; SURFACE PHENOMENA; SURFACE ROUGHNESS; THIN FILMS;

NANOINDENTATION; SCANNING PROBE MICROSCOPY;

PLASTIC FILMS;

EID: 0032311630     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)