Control of nano-structure of the initial growth layers of Co-Cr thin films deposited by facing targets sputtering

Vacuum

Volumn 51, Issue 4, 1998, Pages 595-599

  Nakagawa, Shigeki ^a   Naoe, Masahiko ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COBALT ALLOYS; COERCIVE FORCE; COMPOSITION EFFECTS; COMPRESSIVE STRESS; CRYSTAL ORIENTATION; KRYPTON; MAGNETIC HYSTERESIS; MAGNETIC RECORDING; NANOSTRUCTURED MATERIALS; RESIDUAL STRESSES; SPUTTER DEPOSITION; TENSILE STRESS;

FACING TARGETS SPUTTERING (FTS); PEENING EFFECT;

MAGNETIC THIN FILMS;

EID: 0032310749     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0042-207x(98)00255-3     Document Type: Article

References (7)

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