Novel monolithic and multilevel integration of high-precision 3-D microfluidic components

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3515, Issue , 1998, Pages 183-191

  Yoon, J B ^a   Han, Ch H ^a   Yoon, E ^a   Kim, Ch K ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROPLATING; MONOLITHIC INTEGRATED CIRCUITS; PHOTOLITHOGRAPHY; PHOTORESISTS; THREE DIMENSIONAL; VLSI CIRCUITS;

MICROFLUIDIC COMPONENTS;

MICROMACHINING;

EID: 0032308909     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.322085     Document Type: Conference Paper

References (14)