Micropump for viscous liquids and muds

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3515, Issue , 1998, Pages 40-45

  Schwesinger, N ^a   Bechtel, S ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ETCHING; MICROMACHINING; MICROPROCESSOR CHIPS; PNEUMATIC DRIVES; SEDIMENTATION; SILICON; VISCOSITY OF LIQUIDS;

MICROPUMPS;

PUMPS;

EID: 0032308581     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.322080     Document Type: Conference Paper

References (5)