Warpage measurement of microelectronics devices by far infrared Fizeau interferometry

American Society of Mechanical Engineers, EEP

Volumn 24, Issue , 1998, Pages 93-99

  Verma, K ^a   Han, B ^a  

^a CLEMSON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER CONTROL SYSTEMS; DIELECTRIC DEVICES; ENVIRONMENTAL CHAMBERS; INFRARED RADIATION; INTERFEROMETRY; SURFACE ROUGHNESS;

FAR INFRARED FIZEAU INTERFEROMETRY; WARPAGE MEASUREMENT;

MICROELECTRONICS;

EID: 0032308516     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)