MOCVD growth and saw properties of epitaxial ZnO thin films

Proceedings of the Annual IEEE International Frequency Control Symposium

Volumn , Issue , 1998, Pages 790-795

  Emanetoglu, N W ^a   Gorla, C ^a   Liang, S ^a   Lu, Y ^a  

^a RUTGERS UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC PROPERTIES; ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVE VELOCITY; DISLOCATIONS (CRYSTALS); EPITAXIAL GROWTH; INTERFACES (MATERIALS); METALLORGANIC CHEMICAL VAPOR DEPOSITION; PIEZOELECTRIC MATERIALS; STRAIN; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

LATTICE MISMATCH; TEMPERATURE COEFFICIENT OF FREQUENCY;

ZINC OXIDE;

EID: 0032307313     PISSN: 01616404     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)