Selective/non-selective epitaxy process for a novel SiGe HBT architecture

Materials Research Society Symposium - Proceedings

Volumn 533, Issue , 1998, Pages 321-326

  Schiz, J ^a   Bonar, J M ^a   Ashburn, P ^a  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EPITAXIAL GROWTH; REACTIVE ION ETCHING; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR DOPING; SEMICONDUCTOR GROWTH; SUBSTRATES;

SELECTIVE/NON-SELECTIVE EPITAXY;

HETEROJUNCTION BIPOLAR TRANSISTORS;

EID: 0032304565     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)