Organically deposited metallic films for device fabrication

Materials Research Society Symposium - Proceedings

Volumn 514, Issue , 1998, Pages 473-477

  O'Keefe, T ^a   Stroder, M ^a   O'Keefe, M ^a  

^a MISSOURI UNIVERSITY OF SCIENCE AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONDUCTIVE MATERIALS; CRYSTAL IMPURITIES; ELECTROCHEMISTRY; INTEGRATED CIRCUIT MANUFACTURE; METALLIC FILMS; METALLORGANIC CHEMICAL VAPOR DEPOSITION;

ELECTROCHEMICAL PROCESSES; ORGANIC BASED CHEMICAL SOLUTIONS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0032304294     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-514-473     Document Type: Conference Paper

References (8)