Catalytic decomposition of perfluorocompounds

Materials Research Society Symposium - Proceedings

Volumn 497, Issue , 1998, Pages 59-64

  Kanno, S ^a   Ikeda, S ^a   Yamashita, H ^a   Azuhata, S ^a   Irie, K ^a   Tamata, S ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYST ACTIVITY; DECOMPOSITION; DRY ETCHING; LOW TEMPERATURE OPERATIONS; OXIDES;

CATALYTIC DECOMPOSITION; PERFLUOROCOMPOUNDS;

FLUORINE COMPOUNDS;

EID: 0032302924     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)