Micromachined aperture probe for combined atomic force and near-field scanning optical microscopy (AFM/NSOM)

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3512, Issue , 1998, Pages 76-83

  Drews, D ^a   Noell, W ^a   Ehrfeld, W ^a   Lacher, M ^a   Mayr, K ^a   Marti, O ^a   Serwatzy, C ^a   Abraham, M ^a  

^a INSTITUT FÜR MIKROTECHNIK MAINZ GMBH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ATOMIC FORCE MICROSCOPY; ELECTROMAGNETIC FIELDS; FABRICATION; INTEGRATED OPTICS; MICROMACHINING; MICROSENSORS; OPTICAL MICROSCOPY; OPTICAL SENSORS; OPTICAL WAVEGUIDES; SILICON NITRIDE; THIN FILMS;

MULTIFUNCTIONAL SCANNING PROBES; NEAR FIELD SCANNING OPTICAL MICROSCOPY (NSOM);

PROBES;

EID: 0032302213     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.324079     Document Type: Conference Paper

References (10)