Failure of micron scale single crystal silicon bars due to torsion developed by MEMS micro instruments

Materials Research Society Symposium - Proceedings

Volumn 518, Issue , 1998, Pages 45-49

  Saif, Taher ^a   MacDonald, N C ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CALIBRATION; ELASTIC MODULI; ELECTROSTATIC DEVICES; FAILURE (MECHANICAL); FRACTURE MECHANICS; MICROELECTROMECHANICAL DEVICES; SHEAR STRESS; SINGLE CRYSTALS; TORSIONAL STRESS; TRANSMISSION ELECTRON MICROSCOPY;

ANISOTROPIC THEORY OF ELASTICITY; ELECTROSTATIC ACTUATOR;

SEMICONDUCTING SILICON;

EID: 0032301940     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-518-45     Document Type: Conference Paper

References (6)