Use of novel photoresists in the production of submillimetre wave integrated circuits

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3465, Issue , 1998, Pages 164-168

  Collins, C E ^a   Miles, R E ^a   Parkhurst, G M ^a   Digby, J W ^a   Kazemi, H ^a   Chamberlain, J M ^a   Pollard, R D ^a   Cronin, N J ^a   Davies, S R ^a   Bowen, J W ^a   Steenson, D P ^a  

^a UNIVERSITY OF NOTTINGHAM   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON DEVICE MANUFACTURE; MILLIMETER WAVE DEVICES; PHOTORESISTS; RECTANGULAR WAVEGUIDES;

SUBMILLIMETER WAVE INTEGRATED CIRCUITS;

WAVEGUIDE COMPONENTS;

EID: 0032301302     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)