Growth, patterning and microelectronic applications of epitaxial cobaltdisilicide

Materials Research Society Symposium - Proceedings

Volumn 514, Issue , 1998, Pages 145-155

  Mantl, S ^a   Kappius, L ^a   Antons, A ^a   Loeken, M ^a   Klinkhammer, F ^a   Dolle, M ^a   Zhao, Q T ^a   Mesters, S ^a   Buchal, Ch ^a   Bay, H L ^a   Kabius, B ^a   Trinkaus, H ^a   Heinig, K H ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; COMPUTER SIMULATION; CRYSTALLINE MATERIALS; EPITAXIAL GROWTH; MICROELECTRONICS; MOLECULAR BEAM EPITAXY; MONTE CARLO METHODS; OXIDATION; PHOTODETECTORS; PHOTODIODES; SEMICONDUCTING SILICON; SINGLE CRYSTALS;

ION BEAM SYNTHESIS; MOLECULAR BEAM ALLOTAXY; RAPID THERMAL OXIDATION;

COBALT COMPOUNDS;

EID: 0032301039     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-514-145     Document Type: Conference Paper

References (24)