Electron spin resonance study of light-induced annealing of dangling bonds in glow discharge hydrogenated amorphous silicon: Deconvolution of electron spin resonance spectra

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 37, Issue 12, 1998, Pages 6309-6317

  Takeda, Kosei ^e   Hikita, Harumi ^a   Kimura, Yutaka ^b   Yokomichi, Haruo ^c   Morigaki, Kazuo ^d  

^a MEIKAI UNIVERSITY SCHOOL OF DENTISTRY   (Japan)

^b TOKAI UNIVERSITY   (Japan)

^c TOYAMA PREFECTURAL UNIVERSITY   (Japan)

^d HIROSHIMA INSTITUTE OF TECHNOLOGY   (Japan)

^e Electro Chem and Cancer Institure   (Japan)

Author keywords

Dangling bonds; Deconvolution; ESR; Hydrogenated amorphous silicon; Light induced annealing; Light induced creation

Indexed keywords

AMORPHOUS SILICON; CHEMICAL BONDS; ELECTRON SPIN RESONANCE SPECTROSCOPY; ELECTRONIC DENSITY OF STATES; RADIATION EFFECTS; SPECTRUM ANALYSIS;

DANGLING BONDS; DECONVOLUTION; HYDROGENATED AMORPHOUS SILICON; PHOTOANNEALING;

SEMICONDUCTING SILICON;

EID: 0032300838     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.6309     Document Type: Article

References (21)

1. D. Redfield: Appl. Phys. Lett. 49 (1986) 1517.
2. Z. Y. Wu, J. M. Siefert and B. Equer: J. Non-Cryst. Solids 137-138 (1991) 227.
3. R. Meaudre and M. Meaudre: Phys. Rev. B 45 (1992) 12134.
4. H. Gleskova, P. A. Morin and S. Wagner: Appl. Phys. Lett. 62 (1993) 2063.
5. C. F. O. Graeff, R. Buhleier and M. Stutzmann: Appl. Phys. Lett. 62 (1993) 3001.
6. S. Vignoli, R. Meaudre and M. Meaudre: Philos. Mag. B 73 (1996) 261.
7. S. Vignoli, R. Meaudre, M. Meaudre, P. Roca i Cabarrocas, C. Godet and P. Morin: J. Non-Cryst. Solids 198-200 (1996) 474.
8. K. Takeda, H. Hikita, Y. Kimura, H. Yokomichi, M. Yamaguchi and K. Morigaki: Jpn. J. Appl. Phys. 36 (1997) 991.
9. K. Takeda, H. Hikita, A. Kondo, A. Ganjoo, K. Shimakawa and K. Morigaki: J. Non-Cryst. Solids 227-230 (1998) 311.
10. M. Stutzmann and D. K. Biegelsen: Phys. Rev. B 40 (1989) 9834.
11. H. Hikita, K. Takeda, Y. Kimura, H. Yokomichi and K. Morigaki: J. Non-Cryst. Solids 164-166 (1993) 219.
12. H. Hikita, K. Takeda, Y. Kimura, H. Yokomichi and K. Morigaki: J. Phys. Soc. Jpn. 66 (1997) 1730.
13. K. Morigaki, H. Hikita, M. Yamaguchi and Y. Fujita: J. Non-Cryst. Solids 227-230 (1998) 338.
14. H. Yokomichi and K. Morigaki: Solid State Commun. 85 (1993) 759.
15. T. Gotoh, S. Nonomura, M. Nishio, S. Nitta, M. Kondo and A. Matsuda: to be published in Appl. Phys. Lett.
16. G. Yu, G. Chen and Zhang: J. Non-Cryst. Solids 114 (1989) 429.
17. K. Morigaki: Jpn. J. Appl. Phys. 27 (1988) 163.
18. K. Morigaki: J. Non-Cryst. Solids 141 (1992) 166.
19. H. Hikita, K. Takeda and K. Morigaki: in preparation for publication.
20. J. Isoya and S. Yamasaki: J. Non-Cryst. Solids 164-166 (1993) 169.
21. J. Isoya, S. Yamasaki, H. Okushi, A. Matsuda and K. Tanaka: Phys. Rev. B 47 (1993) 7013.