Micro valve made of PSPI

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 66, Issue , 1998, Pages 31-36

  Wang, Xiaohao ^a   Zhou, Zhaoying ^a   Zhang, Wendong ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

FLOW CONTROL; INTEGRATED CIRCUIT MANUFACTURE; LEAKAGE (FLUID); PHOTOSENSITIVITY; POLYCRYSTALLINE MATERIALS; POLYIMIDES; PRESSURE RELIEF VALVES; PUMPS; SILICON; SINGLE CRYSTALS;

FLOW CONTROL VALVES; MICROPUMPS; MICROVALVES; PHOTOSENSITIVE POLYIMIDE;

MICROELECTROMECHANICAL DEVICES;

EID: 0032300322     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)