Atomic hydrogen gun for cleaning of GaAs surface

Electron Technology (Warsaw)

Volumn 31, Issue 3-4, 1998, Pages 495-498

  Girycki, A ^a   Szuber, J ^a  

^a SILESIAN UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL CLEANING; ELECTRIC SPACE CHARGE; HYDROGEN; PHOTOELECTRON SPECTROSCOPY; PLASMA GUNS;

ATOMIC HYDROGEN GUNS; PHOTOEMISSION YIELD SPECTROSCOPY (PYS);

SEMICONDUCTING GALLIUM ARSENIDE;

EID: 0032299589     PISSN: 00709816     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (15)