Wireless remote microaccelerometer

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3316, Issue 1, 1998, Pages 497-503

  Varadan, Vijay K ^a   Subramanian, Hareesh ^a   Varadan, Vasundara V ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; ACOUSTIC ARRAYS; MICROELECTROMECHANICAL DEVICES; MICROELECTRONICS; MICROMACHINING;

WIRELESS REMOTE MICROACCELEROMETERS;

SILICON SENSORS;

EID: 0032299456     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)