Characterization of spin -on glasses by microindentation

Materials Research Society Symposium - Proceedings

Volumn 511, Issue , 1998, Pages 157-164

  Simonyi, Eva E ^a   Lee, K W ^a   Cook, Robert F ^a   Liniger, Eric G ^a   Speidell, James ^a   Srivastava, Kamelesh ^a  

^a IBM RESEARCH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BRITTLENESS; CRACKS; CURING; DELAMINATION; ELASTIC MODULI; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HARDNESS; HYDROGEN BONDS; MECHANICAL VARIABLES MEASUREMENT; PERMITTIVITY; TEMPERATURE;

INSULATING LAYERS; LIFE EXPECTANCY; MICROINDENTATION; SPIN ON GLASSES;

GLASS;

EID: 0032299293     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-511-157     Document Type: Conference Paper

References (5)