Near-contact mode: A novel AFM operation mode for non-destructive, ultra-high lateral resolution topography measurement in air

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3512, Issue , 1998, Pages 40-53

  Ho, Huddee J ^a  

^a TopoMetrix Corporation   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTROMECHANICAL DEVICES; NONDESTRUCTIVE EXAMINATION; SURFACE MEASUREMENT; SURFACE TOPOGRAPHY; VIBRATIONS (MECHANICAL);

TOPOGRAPHY MEASUREMENT; VIBRATING CANTILEVERS;

ATOMIC FORCE MICROSCOPY;

EID: 0032298939     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.324048     Document Type: Conference Paper

References (17)