Porous silica: a potential material for low dielectric constant applications

Materials Research Society Symposium - Proceedings

Volumn 511, Issue , 1998, Pages 111-116

  Birdsell, Edward D ^a   Gerhardt, Rosario A ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL REACTIONS; DEPOSITION; DIELECTRIC MATERIALS; DIELECTRIC PROPERTIES; ELECTRIC PROPERTIES; FILM PREPARATION; INTEGRATED CIRCUIT MANUFACTURE; PERMITTIVITY; POROUS MATERIALS; SOL-GELS; THICKNESS MEASUREMENT; THIN FILMS;

COLLOIDAL SILICA; POTASSIUM SILICATE; SPIN COATING;

SILICA;

EID: 0032298119     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-511-111     Document Type: Conference Paper

References (10)