Electroplated and screen-printed magnetic materials applicable to micromachined magnetic devices

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3512, Issue , 1998, Pages 154-167

  Park, Jae Y ^a   Allen, Mark G ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS ALLOYS; COBALT ALLOYS; ELECTRIC INDUCTORS; ELECTROMAGNETIC SHIELDING; ELECTROPLATING; FERRITE DEVICES; MAGNETIC ANISOTROPY; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; NICKEL ALLOYS; SCREEN PRINTING; SUPERALLOYS;

MICROMAGNETIC DEVICES; PERMALLOY;

MAGNETIC FILMS;

EID: 0032298052     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.324051     Document Type: Conference Paper

References (28)