Lateral epitaxial overgrowth of and defect reduction in GaN thin films

Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

Volumn 1, Issue , 1998, Pages 360-361

  Davis, Robert F ^a   Nam, O H ^a   Bremser, M D ^a   Zheleva, T ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTAL MICROSTRUCTURE; CRYSTAL ORIENTATION; DISLOCATIONS (CRYSTALS); EPITAXIAL GROWTH; ETCHING; PHOTOLITHOGRAPHY; SEMICONDUCTING GALLIUM COMPOUNDS; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR GROWTH; SILICA; SURFACE ROUGHNESS;

ALUMINUM NITRIDE; GALLIUM NITRIDE; LOW PRESSURE CHEMICAL VAPOR DEPOSITION;

SEMICONDUCTING FILMS;

EID: 0032297317     PISSN: 10928081     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)