Fabrication and use of metal tip and tip-on-tip probes for AFM-based device analysis

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3512, Issue , 1998, Pages 92-103

  Hantschel, T ^a   De Wolf, P ^a   Trenkler, T ^a   Stephenson, R ^a   Vandervorst, W ^a  

^a IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE CARRIERS; ELECTRIC CONDUCTIVITY OF SOLIDS; FABRICATION; PROBES; SEMICONDUCTING INDIUM PHOSPHIDE; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS;

METAL TIP PROBES; SCANNING CAPACITANCE MICROSCOPY (SCM); SCANNING SPREADING RESISTANCE MICROSCOPY (SSRM); TIP-ON-TIP PROBES;

ATOMIC FORCE MICROSCOPY;

EID: 0032296255     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.324089     Document Type: Conference Paper

References (12)