Microresonant devices for power conversion

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3514, Issue , 1998, Pages 260-265

  Noworolski, J Mark ^a   Sanders, S R ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC ENERGY STORAGE; ELECTRIC POTENTIAL; MICROMACHINING; POWER CONVERTERS; RESONATORS; SEMICONDUCTING SILICON;

MICRORESONANT DEVICES; POLYSILICON;

MICROELECTROMECHANICAL DEVICES;

EID: 0032296250     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)