Growth of InGaAs/GaAs on offcut substrates by MOVPE: Influence on macrosteps and dislocations formation

Crystal Research and Technology

Volumn 33, Issue 3, 1998, Pages 375-382

  Frigeri, C ^a   Brinciotti, A ^b   Ritchie, D M ^b  

^a CNR   (Italy)

^b Alcatel   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; DISLOCATIONS (CRYSTALS); METALLORGANIC VAPOR PHASE EPITAXY; NUCLEATION; SEMICONDUCTING INDIUM GALLIUM ARSENIDE; SEMICONDUCTOR GROWTH; SUBSTRATES;

MACROSTEPS;

SEMICONDUCTOR QUANTUM WELLS;

EID: 0032295956     PISSN: 02321300     EISSN: None     Source Type: Journal    
DOI: 10.1002/(sici)1521-4079(1998)33:3<375::aid-crat375>3.0.co;2-r     Document Type: Article

References (24)

1. ABRAHAMS, M. S.: Crystal Growth and Characterization, Eds. R. Ueda, J. B. Mullin, North-Holland, Amsterdam 1975, p. 187
2. ALBRECHT, M., STRUNK H. P., HULL R., BONAR, J. M.: Appl. Phys. Lett. 62 (1993) 2206
3. CERVA H.: Appl. Surf. Sci. 50 (1991) 19
4. CHEN Y., ZAKHAROV N. D., WERNER P., LILIENTAL-WEBER Z., WASHBURN J., KLEM J. F., TSAO, J. Y.: Appl. Phys. Lett. 62 (1993) 1536
5. COX, H. M., ASPNES, D. E., ALLEN, S. J., BASTOS, P., HWANG, D. M., MAHAJAN, S., SHAHID, M. A., MORAIS, P. C.: Appl. Phys. Lett. 57 (1990) 611
6. FREUND L. B.: J. Appl. Phys. 68 (1990) 2073
7. FRIGERI, C., Di Paola, A., GAMBACORTI, N., RITCHIE, D. M., LONGO, F., DELLAGIOVANNA, M.: Mater. Sci. Eng. B 28 (1994) 346
8. GLAS, F.: J. Appl. Phys. 70 (1991) 3556
9. HAGEN, W., STRUNK, H.: Appl. Phys. 17 (1978) 85
10. HIRAMOTO, K., TSUCHIYA, T., SAGAWA, M., UOMI, K.: J. Crystal Growth 145 (1994) 133
11. HULL, R., BEAN, J. C., BUESCHER, C.: J. Appl. Phys. 66 (1989) 5837
12. JESSON D. E., PENNYCOOK S., BARIBEAU J.-M., HOUGHTON D. C.: Phys. Rev. Lett. 71 (1993) 1744
13. KAMAT, S. V., HIRTH, J. P.: J. Appl. Phys. 67 (1990) 6844
14. KIGHTLEY P., KIELY C. J., GOODHEW P. J.: Inst. Phys. Conf. Ser. 117 (1991) 595
15. LEFEBVRE, A., HERBEAUX, C., BOUILLET, C., DI PERSIO, J.: Phil. Mag. Lett. 63 (1991) 23
16. LEGOUES, F. K., MEYERSON, B. S., MORAR, J. F.: Phys. Rev. B 66 (1991) 2903
17. LEGOUES, F. K., MEYERSON B. S., MORAR J. F., KIRCHNER P. D.: J. Appl. Phys. 71 (1992) 4230
18. LEGOUES, F. K., MOONEY, P. M., TERSOFF, J.: Phys. Rev. B 71 (1993) 396
19. MAREÉ, P. M. J., BARBOUR, J. C., VAN DER VEEN, J. F., KAVANAGH, K. L., BULLE-LIEUWMA C. W. T., VIEGERS M. P. A.: J. Appl. Phys. 62 (1987) 4413
20. MATTHEWS, J. W.: Epitaxial Growth, pt. B, Ed. J. W. Matthews, Academic Press, New York 1975, p. 560
21. MATTHEWS, J. W., BLAKESLEE, A. E., MADER, S.: Thin Solid Films 33 (1976) 253
22. MOISON, J. M., GUILLE, C., HOUZAY, F., BARTHE, F., VAN ROMPAY, M.: Phys. Rev. B 40 (1989) 6149
23. MOONEY, P. M., LEGOUES, F. K., TERSOFF, J., CHU, J. O.: J. Appl. Phys. 75 (1994) 3968
24. PETROFF, P. M.: J. Vac. Sci. Technol. 14 (1977) 973