Polysilicon for everything?

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3514, Issue , 1998, Pages 298-306

  Ward, M C L ^a   McNie, M ^a   Bunyan, R J T ^a   King, D O ^a   Carline, R ^a   Wilson, R ^a   Gillham, J ^a  

^a Agency   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

COST EFFECTIVENESS; MICROELECTRONICS; MICROMACHINING;

POLYSILICON;

SILICON SENSORS;

EID: 0032295601     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)