Changes in surface characteristics of HgCdTe by dry etching

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3436, Issue 1, 1998, Pages 77-83

  Song, K H ^a   Yoon, T H ^a   Hahn, S R ^a   Kim, E T ^a   Kwon, J H ^a   Lee, S G ^a   Hwang, T S ^a   Lee, Y S ^a   Kim, J M ^a  

^a PaiChai University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRIC CURRENTS; ELECTRIC POTENTIAL; ELECTRON CYCLOTRON RESONANCE; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HALL EFFECT; MERCURY COMPOUNDS; MIXTURES; MORPHOLOGY; PLASMA ETCHING; SCANNING ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

PREFERENTIAL ETCHING;

INFRARED DETECTORS;

EID: 0032294733     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.327994     Document Type: Conference Paper

References (10)