Micromachined CMOS in vivo pressure sensor

Proceedings of the Mediterranean Electrotechnical Conference - MELECON

Volumn 1, Issue , 1998, Pages 306-310

  El Bahar, A ^a   Nemirovsky, Y ^a   Soustiel, J F ^a   Feinsod, M ^a  

^a TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; CAPACITORS; CMOS INTEGRATED CIRCUITS; ETCHING; OSCILLATORS (ELECTRONIC); PRESSURE; SEMICONDUCTING SILICON; SENSORS; VLSI CIRCUITS;

CEREBROSPINAL FLUID PRESSURE; INTEGRATED MICROSYSTEM; PRESSURE SENSOR; SILICON CHIP;

MICROELECTRONIC PROCESSING;

EID: 0032294617     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (25)