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Volumn 31, Issue 3-4, 1998, Pages 304-310

Wet and dry etching of GaSb/GaInAsSb/GaAlAsSb photodiode heterostructures

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL LATTICES; DRY ETCHING; HYDROCHLORIC ACID; HYDROGEN PEROXIDE; INFRARED RADIATION; PASSIVATION; PHOTODIODES; SEMICONDUCTING INDIUM GALLIUM ARSENIDE; SEMICONDUCTOR PLASMAS; SOLUTIONS; SURFACE TREATMENT; WATER;

EID: 0032294523     PISSN: 00709816     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (4)

References (36)
  • Reference 정보가 존재하지 않습니다.

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.