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Volumn 31, Issue 3-4, 1998, Pages 304-310
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Wet and dry etching of GaSb/GaInAsSb/GaAlAsSb photodiode heterostructures
a a a a a a a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
CRYSTAL LATTICES;
DRY ETCHING;
HYDROCHLORIC ACID;
HYDROGEN PEROXIDE;
INFRARED RADIATION;
PASSIVATION;
PHOTODIODES;
SEMICONDUCTING INDIUM GALLIUM ARSENIDE;
SEMICONDUCTOR PLASMAS;
SOLUTIONS;
SURFACE TREATMENT;
WATER;
WET ETCHING;
HETEROJUNCTIONS;
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EID: 0032294523
PISSN: 00709816
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (4)
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References (36)
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