MOVPE growth of GaNAs using tertiarybutylarsine (TBA) and dimethylhydrazine (DMHy)

Conference Proceedings - International Conference on Indium Phosphide and Related Materials

Volumn , Issue , 1998, Pages 139-142

  Moto, Akihiro ^a   Tanaka, So ^a   Ikoma, Nobuyuki ^a   Tanabe, Tatsuya ^a   Takagishi, Shigenori ^a   Takahashi, Mitsuo ^a   Katsuyama, Tsukuru ^a  

^a SUMITOMO ELECTRIC INDUSTRIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLINE MATERIALS; METALLORGANIC VAPOR PHASE EPITAXY; PHOTOLUMINESCENCE; RAPID THERMAL ANNEALING; SEMICONDUCTING GALLIUM COMPOUNDS; SUBSTRATES; THERMAL EFFECTS;

DIMETHYLHYDRAZINE; LOW PRESSURE METALLORGANIC VAPOR PHASE EPITAXY; TERTIARYBUTYLARSINE;

SEMICONDUCTOR GROWTH;

EID: 0032294186     PISSN: 10928669     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)