Effect of gas addition on ozone ashing

Journal of the Electrochemical Society

Volumn 145, Issue 12, 1998, Pages 4323-4327

  Omiya, Kayoko ^a   Kataoka, Yoshinori ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMMONIA; CHEMICAL BONDS; COMPOSITION EFFECTS; DECOMPOSITION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; GASOHOL; OXIDATION RESISTANCE; OZONE; X RAY PHOTOELECTRON SPECTROSCOPY;

OZONE ASHING;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0032294177     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1838958     Document Type: Article

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