Microelectromechanical systems

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 66, Issue , 1998, Pages 239-245

  Lin, Liwei ^a   Lee, A P ^a   Kenny, T ^a   Kim, C J ^a   Jara Almonte, J ^a   Hirano, T ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ENGINEERING RESEARCH; INFORMATION DISSEMINATION; SOCIETIES AND INSTITUTIONS; TECHNICAL PRESENTATIONS;

POSTER SESSIONS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032293831     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)