Use of pulsed vacuum arc deposition method for making films of various materials

International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV

Volumn 2, Issue , 1998, Pages 601-604

  Tochitsky, E I ^a   Gasenkova, I V ^a   Milashevskaya, I G ^a   Selifanov, O V ^a   Stankevich, E V ^a  

^a INSTITUTE FOR MATHEMATICS   (Belarus)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; FILM GROWTH; IONIZATION OF SOLIDS; METALLIC FILMS; MULTILAYERS; NUCLEATION; PHASE COMPOSITION; PLASMA FLOW; SUBSTRATES; VACUUM;

PULSED VACUUM ARC DEPOSITION METHODS;

ELECTRIC ARCS;

EID: 0032292028     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)