Microfabrication of high aspect-ratio Bi-Te alloy microposts and applications in micro-sized cooling probes

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3512, Issue , 1998, Pages 336-341

  Huang, Lei ^a   Wang, Wanjun ^a   Murphy, Michael C ^a  

^a LOUISIANA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ASPECT RATIO; BISMUTH ALLOYS; CURRENT DENSITY; ELECTRODEPOSITION; ELECTROLYTES; ELECTROPLATING; MICROMACHINING; NITRIC ACID; PROBES; SUBSTRATES;

HIGH ASPECT-RATIO MICROPOSTS; MICRO-SIZED COOLING PROBES; MICROFABRICATION;

MICROELECTROMECHANICAL DEVICES;

EID: 0032291599     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.324076     Document Type: Conference Paper

References (12)