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Volumn , Issue , 1998, Pages 221-225
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Doped β-FeSi2 as thin film thermoelement sensor material
a a a
a
IFW DRESDEN
(Germany)
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Author keywords
[No Author keywords available]
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Indexed keywords
ALUMINUM;
COBALT;
IRON COMPOUNDS;
MANGANESE;
NICKEL;
SEMICONDUCTOR DOPING;
SENSORS;
SPUTTER DEPOSITION;
THERMOCOUPLES;
THERMODYNAMIC STABILITY;
THERMOPILES;
THIN FILM DEVICES;
IRON SILICIDE;
THERMOELEMENT SENSOR MATERIAL;
THERMOELECTRIC EQUIPMENT;
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EID: 0032291334
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (3)
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References (9)
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