Raman spectroscopy of epitaxial Si/Si1-xGex heterostructures

Materials Research Society Symposium - Proceedings

Volumn 533, Issue , 1998, Pages 63-68

  Liu, Ran ^a   Zollner, Stefan ^a   Liaw, Ming ^a   O'Meara, David ^a   Cave, Nigel ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL LATTICES; EPITAXIAL GROWTH; HEAT TREATMENT; RAMAN SCATTERING; SEMICONDUCTING SILICON; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR GROWTH;

LATTICE MISMATCH;

HETEROJUNCTIONS;

EID: 0032291327     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-533-63     Document Type: Conference Paper

References (5)