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Volumn 533, Issue , 1998, Pages 203-208
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Magnetron sputter heteroepitaxy of Si1-xGex/Si(001): The evolution of the cross-hatched surface
a
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Author keywords
[No Author keywords available]
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Indexed keywords
EPITAXIAL GROWTH;
MAGNETRON SPUTTERING;
SCANNING TUNNELING MICROSCOPY;
SEGREGATION (METALLOGRAPHY);
SEMICONDUCTING SILICON COMPOUNDS;
SEMICONDUCTOR GROWTH;
SURFACE PROPERTIES;
THERMAL EFFECTS;
CROSS-HATCHED SURFACE;
HETEROJUNCTIONS;
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EID: 0032291326
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-533-203 Document Type: Conference Paper |
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Times cited : (2)
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References (14)
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