Novel technique to measure the thermal conductivity of thin film membranes

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3512, Issue , 1998, Pages 367-373

  Irace, Andrea ^a   Sarro, Pasqualina M ^a  

^a UNIVERSITY OF NAPLES FEDERICO II   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

SEMICONDUCTING SILICON COMPOUNDS; THERMAL CONDUCTIVITY OF SOLIDS; THERMOCOUPLES; THIN FILMS;

POLYSILICON RESISTORS; THIN FILM MEMBRANES;

MICROELECTROMECHANICAL DEVICES;

EID: 0032289749     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.324081     Document Type: Conference Paper

References (15)