Design of resonant beam transducers: An axial force probe for atomic force microscopy

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 66, Issue , 1998, Pages 247-252

  Harley, Jonah A ^a   Chow, Eugene M ^a   Kenny, Thomas W ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; NATURAL FREQUENCIES; PROBES; RESONANCE; TRANSDUCERS;

AXIAL FORCE PROBES; RESONANT BEAM TRANSDUCERS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032289182     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)