Laterally coupled strained MQW ridge waveguide distributed-feedback laser diode fabricated by wet-dry hybrid etching process

IEEE Photonics Technology Letters

Volumn 10, Issue 12, 1998, Pages 1688-1690

  Watanabe, Yoshiaki ^b   Chen, Nong ^a,b   Takei, Kiyoshi ^b   Chikuma, Kiyofumi ^b   Futakuchi, Naoki ^c   Nakano, Yoshiaki ^a,c  

^a IEEE

^b PIONEER CORPORATION   (Japan)

^c UNIVERSITY OF TOKYO   (Japan)

Author keywords

Distributed feedback lasers; Grain; Quantum well lasers; Semiconductor lasers; Strain

Indexed keywords

DIFFRACTION GRATINGS; DISTRIBUTED FEEDBACK LASERS; ELECTRIC CURRENTS; ELECTRON BEAM LITHOGRAPHY; ETCHING; LASER MODES; OPTICAL WAVEGUIDES; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING INDIUM PHOSPHIDE; SEMICONDUCTOR DEVICE MANUFACTURE;

SIDEMODE SUPPRESSION RATIO; THRESHOLD CURRENT; WET ETCHING PROCESS;

QUANTUM WELL LASERS;

EID: 0032289084     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/68.730470     Document Type: Article

References (9)

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