Simulation and design of electro-thermally actuated MEMS devices. A case study: The AFIT piston micromirror

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 66, Issue , 1998, Pages 293-298

  Ghaddar, Chahid K ^a   van Kuijk, Joost ^a   Gilbert, John R ^a   Cowan, William D ^a   Butler, Jeffrey T ^a   Bright, Victor M ^a  

^a Microcosm Technologies Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; FINITE ELEMENT METHOD; HEAT TRANSFER COEFFICIENTS; LIGHT REFLECTION; MATHEMATICAL MODELS; MIRRORS; RESIDUAL STRESSES; THERMAL CONDUCTIVITY OF SOLIDS;

ELECTROTHERMALLY ACTUATED MICROMIRRORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032289072     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)