Thin film microresonator for vacuum sensing

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 66, Issue , 1998, Pages 241-246

  Yuan, F ^a   Tom, C L ^a   Mastrangelo, C H ^a   Martin, J ^a   Pfenninger, R ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

NATURAL FREQUENCIES; RESONATORS; SILICON WAFERS; THIN FILM DEVICES; VACUUM TECHNOLOGY;

THIN FILM MICRORESONATORS; VACUUM SENSING;

MICROSENSORS;

EID: 0032289071     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)