Si/Ge/Si(001) magnetron sputter heteroepitaxy: The initial stages of `hut' - cluster overgrowth

Materials Research Society Symposium - Proceedings

Volumn 533, Issue , 1998, Pages 209-214

  Vogeli, B ^a   Kummer, M ^a   Von Kanel, H ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; EPITAXIAL GROWTH; MAGNETRON SPUTTERING; SEGREGATION (METALLOGRAPHY); SEMICONDUCTING GERMANIUM; SEMICONDUCTING SILICON;

MAGNETRON SPUTTER HETEROEPITAXY;

HETEROJUNCTIONS;

EID: 0032288156     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-533-209     Document Type: Conference Paper

References (16)