Influence of fabrication and crystal orientation on the strength of silicon microridges

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 66, Issue , 1998, Pages 413-420

  Chen, Quanfang ^a   Yao, Da Jeng ^a   Kim, Chang Jin ^a   Carman, Greg P ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; DRY ETCHING; REACTIVE ION ETCHING; SEMICONDUCTING SILICON; STRENGTH OF MATERIALS;

SILICON MICRORIDGES;

MICROELECTROMECHANICAL DEVICES;

EID: 0032287987     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)