Analysis on multi-layered, corrugated diaphragm with residual stress

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 66, Issue , 1998, Pages 373-378

  Yan, Hai ^a   Lou, Kuok Chun ^a   Lee, Byungchai ^a   Kim, Eun Sok ^a  

^a UNIVERSITY OF HAWAII   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIAPHRAGMS; ELASTIC MODULI; FINITE DIFFERENCE METHOD; MICROMACHINING; PIEZOELECTRIC DEVICES; RESIDUAL STRESSES; STRESS ANALYSIS; STRESS CONCENTRATION;

CORRUGATED DIAPHRAGMS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032287986     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)