Advanced mask printability analysis using TINT Virtual Stepper system

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3546, Issue , 1998, Pages 466-476

  Taylor, Darren ^a   Eandi, Richard D ^a  

^a PHOTRONICS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; COMPUTER SOFTWARE; IMAGING TECHNIQUES; PHOTORESISTS; SCANNING ELECTRON MICROSCOPY;

VIRTUAL STEPPER SYSTEMS;

MASKS;

EID: 0032287974     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.332869     Document Type: Conference Paper

References (0)