Improvement of crystalline quality of 3-inch InP wafers for microelectronics applications

Conference Proceedings - International Conference on Indium Phosphide and Related Materials

Volumn , Issue , 1998, Pages 381-384

  Gondet, S ^a   Duffar, T ^a   Jacob, G ^a   Van Den Bogaert, N ^a   Louchet, F ^a  

^a InPACT SA   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CALCULATIONS; COMPUTER SIMULATION; CRYSTAL GROWTH; CRYSTALS; DISLOCATIONS (CRYSTALS); FINITE ELEMENT METHOD; HEAT TRANSFER; OPTIMIZATION; THERMAL STRESS;

CRYSTAL QUALITY; DISLOCATION DENSITY; THERMAL SHIELD;

SEMICONDUCTING INDIUM PHOSPHIDE;

EID: 0032287452     PISSN: 10928669     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)