Quantitative determination of the dielectric constant of the interfacial layer in PZT ferroelectric capacitors

IEEE International Symposium on Applications of Ferroelectrics

Volumn , Issue , 1998, Pages 73-76

  Bartic, Andrei T ^a   Wouters, Dirk J ^a   Sing, Jin ^a   Norga, Gerd ^a   Bender, Hugo ^a   Maes, Herman E ^a  

^a IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; CAPACITANCE MEASUREMENT; CRYSTALLIZATION; FERROELECTRIC DEVICES; HYSTERESIS; LEAD COMPOUNDS; PERMITTIVITY; THIN FILM DEVICES; TRANSMISSION ELECTRON MICROSCOPY; VOLTAGE MEASUREMENT; X RAY DIFFRACTION ANALYSIS;

FERROELECTRIC CAPACITORS;

CAPACITORS;

EID: 0032286723     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (6)